MEMS and Nanotechnology (Dept Elec - III) (2182008)  

List of Practicals

Sr. Practical Title
1
Introduction to MEMS & Microsystems.
2
Mechanics of MEMS
3
Dynamics of MEMS
4
Fabrications processes for MEMS
5
To Perform Multiphysics Analysis of a Thermal Actuator -I
6
To Perform Multiphysics Analysis of a Thermal Actuator -II
7
Design and Analysis of MEMS Pressure Sensor-I
8
Design and Analysis of MEMS Pressure Sensor-II
9
MEMS simulations using COMSOL
10
Nanotechnology basics

Open Ended Problem
Student may be given a task to simulate MEMS structures using softwares.
Major Equipment
MEMS simulation software may be used for the performance of simulation.
Other
The website of NPTL may be utilized for additional learning.