MEMS and Nanotechnology (Dept Elec - III) (2182008)  

Syllabus

Sr. Topics Teaching Hours Module Weightage
1
Introduction to MEMS and Micro Systems
MEMS and Microsystems, Typical MEMS and Microsystem Products, Evolution of Microfabrication, Microsystems and Microelectronics, The Multidisciplinary Nature of Microsystem, Design and Manufacture, Microsystems and Miniaturization, Applications of Microsystems in the Automotive Industry, Applications of Microsystems in Other Industries
7
18 %
2
Working Principles of Microsystems:
Introduction, Microsensors, Microactuation, MEMS with Microactuators, Micro accelerometers
3
7 %
3
Engineering Mechanics for Microsystem Design
Introduction, Static bending of thin plates, Mechanical Vibration, Thermo mechanics, Fracture mechanics, Thin Film mechanics, Use of FEA in MEMS structures.
5
12 %
4
Scaling Laws in Miniaturization :
Introduction to Scaling, Scaling in Geometry, Scaling in Rigid-Body Dynamics, The Trimmer Force Scaling Vector, Scaling in Electrostatic Forces, Scaling in Electromagnetic Forces, Scaling in Electricity, Scaling in Fluid Mechanics
2
5 %
5
Microsystem Materials:
Molecular Theory and Intermolecular Forces – Silicon Piezo Resistors– Electrochemistry – Substrates and Wafers – Silicon Compounds – Polymers – Packaging Materials.
5
12 %
6
Microsystem Fabrication Process:
Photolithography – Ion Implantation – Diffusion –Oxidation – Chemical Vapor Deposition – Etching – Applications of MEMS in Automatic-Telecom and Other Industries.
9
22 %
7
Nanotechnology Basics:
Nanobuilding Blocks – Atoms and Molecular Structure –Molecular Recognition – Tools For Measuring Nanostructures – Electron Microscopy – Spectroscopy – Molecular Synthesis and Polymerization – Encapsulation.
3
7 %
8
Science of Nano Materials
Classification of nano structures – effect of the nanometer length scale effects of nano scale dimensions on various properties – structural, thermal, chemical, mechanical, magnetic, optical and electronic properties – effect of nanoscale dimensions on biological systems. Fabrication methods – Top down processes – bottom up process.
4
10 %
9
Applications of Nanotechnology In Medicines:
Nanobiosensors – Electronic Nose – Photo Dynamic Therapy – Molecular Motors – Protein Engineering.
3
7 %