Nanolithography (2183901)  

3
Credit
3 + 0 + 0
Lect + Tuto + Pract
Teaching Scheme
70 + 20 + 10
ESE + PA + ALA
Theory Marks
0 + 0 + 0
ESE + OEP + PA
Practical Marks
ESE - End Semester Examination, PA - Progress Assessment, ALA - Active Learning Assignments, OEP -Open Ended Problem


Prerequisite
Physics of Nanomaterials, Characterization of Nanomaterials, Coating Technology, Thin Film Technology
Rationale
To make the students understand the newly developed fabrication, physics and chemistry of multilayered devices
Course Outcome
After learning the course the students should be able to:
1. To notify the learner about the various type of lithography technique.
2. To understand about fabrication of devices.
3. To understand about which lithography technique is best for devices.

Active Learning
Preparation of power-point slides, which include videos, animations, pictures, graphics for better understanding theory and practical work – The faculty will allocate chapters/ parts of chapters to groups of students so that the entire syllabus to be covered. The power-point slides should be put up on the web-site of the College/ Institute, along with the names of the students of the group, the name of the faculty, Department and College on the first slide. The best three works should submit to GTU.